Nanoimprint lithography (NIL)
The 4th edition’s ISBNs are 978-0199861226 (print) and 978-0199346082 (eBook). Use these to verify you are getting the correct version. fabrication engineering at the micro- and nanoscale 4th pdf
The text is heavily biased toward digital CMOS logic. While this is the bulk of the industry, students specializing in photonics, analog sensors, or power electronics may find the specific process integration advice lacking for those niche fields. Nanoimprint lithography (NIL) The 4th edition’s ISBNs are